Author :
Yang, S. ; Chen, J. ; Chen, S. ; Chen, Z. ; Fan, A. ; He, B. ; Jiang, Q. ; Kuang, E. ; Lin, Yeou-Fu ; Liu, Y. ; Ning, J. ; Pai, C.-H. ; Sun, P. ; Tang, D. ; Wu, H.M. ; Xing, G.-Q. ; Xu, J. ; Yu, X. ; Zhang, J. ; Zheng, X.W. ; Zhi, C.
Abstract :
A leading edge of CMOS technology and foundry manufacturing in mainland China is described in the present paper. In the technology development, effective yield learning methodology is created to shorten the learning cycle for mass production. It is shown that the innovative manufacturing provides unique values for customers. It is also demonstrated that the right cost structure based on both optimized process and device design can insure the cost control very effective. The discussion of methodology of bringing up the fab to spec, yield issues, and processing development for such a highly complex entity has been included in the paper.
Keywords :
CMOS integrated circuits; integrated circuit yield; mass production; CMOS technology; China; customer oriented technologies; device design; foundry manufacturing; mass production; process optimization; yield learning methodology; CMOS technology; Cost function; Dielectric materials; Foundries; Lead compounds; Logic devices; Production; Pulp manufacturing; Random access memory; Semiconductor device manufacture;
