Design and realization of high Q millimeter-wave structures through micromachining techniques

Author

Guillon, B. ; Cros, D. ; Pons, P. ; Grenier, K. ; Parra, T. ; Cazaux, J.L. ; Lalaurie, J.C. ; Graffeuil, J. ; Plana, R.

Author_Institution

LAAS, CNRS, Toulouse, France

Volume

4

fYear

1999

fDate

13-19 June 1999

Firstpage

1519

Abstract

This paper deals with an original design and realization of high performance micromachined millimeter wave passive circuit on silicon. An appropriate coupling between two coplanar micromachined lines and a dielectric resonator acting on its whispering gallery modes have allowed a loaded quality factor ranging from 500 to 2400 at 35 GHz and leading to a Micromachined Dielectric Resonator Oscillator (MDRO) realization. From finite element 2D simulations, we have obtained unloaded quality factor of 2040 at 77 GHz and 95 GHz using an original micromachined silicon dielectric resonator.

Keywords

Q-factor; coplanar waveguides; dielectric resonator oscillators; finite element analysis; micromachining; millimetre wave circuits; passive networks; 35 GHz; 77 GHz; 95 GHz; coplanar micromachined lines; dielectric resonator; finite element 2D simulations; high Q millimeter-wave structures; loaded quality factor; micromachined dielectric resonator oscillator; micromachining techniques; millimeter wave passive circuit; unloaded quality factor; whispering gallery modes; Circuit simulation; Coupling circuits; Dielectrics; Finite element methods; Millimeter wave circuits; Oscillators; Passive circuits; Q factor; Silicon; Whispering gallery modes;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1999 IEEE MTT-S International

Conference_Location

Anaheim, CA, USA

Print_ISBN

0-7803-5135-5

Type

conf

DOI

10.1109/MWSYM.1999.780243

Filename

780243