Title :
Modeling of the millimeter-wave behavior of MEMS capacitive switches
Author_Institution :
Lehrstuhl fur Hochfrequenztech., Tech. Univ. Munchen, Germany
Abstract :
The analysis of the millimeter-wave behavior of micromechanical capacitive switches by the method of lines (MoL) is presented. For this purpose the method of lines is extended for consideration of very thin lossy metallic and dielectric layers without increasing the numerical effort by modifying the difference operators in a suitable way. The calculated results of a metal membrane switch show very good agreement to measured data.
Keywords :
method of lines; micromechanical devices; microwave switches; millimetre wave devices; MEMS capacitive switch; dielectric layer; difference operator; metal membrane; method of lines; millimeter-wave device; numerical model; Biomembranes; Communication switching; Coplanar waveguides; Dielectric losses; Micromechanical devices; Millimeter wave technology; Phased arrays; Radio frequency; Switches; Voltage;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.780295
