DocumentCode
3004100
Title
Bonding Formation Of Semiconductor Surface With Different Materials By Radiation Technology
Author
Bakhtizin, R. ; Makhov, V. ; Suvorov, A.
Author_Institution
Bashkir State University
fYear
1993
fDate
12-15 Jul 1993
Firstpage
86
Lastpage
86
Keywords
Atomic layer deposition; Bonding; Materials reliability; Physics; Reliability theory; Semiconductor device reliability; Semiconductor films; Semiconductor materials; Solid state circuits; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN
0-7803-0852-2
Type
conf
DOI
10.1109/IVMC.1993.700290
Filename
700290
Link To Document