Title :
Fabrication Of Lateral Triode With Comb-shaped Field-emitter Arrays
Author :
Itoh, Junji ; Ushiki, Kazunari ; Tsuburaya, Kazuhiko ; Kanemaru, Seigo
Author_Institution :
Tokai University
Keywords :
Anodes; Fabrication; Field emitter arrays; Laboratories; Microelectronics; Niobium; Resistors; Shape measurement; Transconductance; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
DOI :
10.1109/IVMC.1993.700298
