DocumentCode :
3006409
Title :
CVD And PECVD Carbonization Of Silicon Microtips
Author :
Zhirnov, V.V. ; Givargizov, E.I.
Author_Institution :
Russian Academy of Sciences
fYear :
1993
fDate :
12-15 Jul 1993
Firstpage :
110
Lastpage :
111
Keywords :
Chemical processes; Coatings; Crystallography; Geometry; Hydrocarbons; Oxidation; Plasma temperature; Semiconductor materials; Silicon carbide; Vacuum technology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1993., Proceedings of IEEE 6th International
Print_ISBN :
0-7803-0852-2
Type :
conf
DOI :
10.1109/IVMC.1993.700304
Filename :
700304
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3006409
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