Title :
Microfluidic Bead Array Device Using Laser-Machined Surface Microstructures on Silica Glass
Author :
Sato, Tadatale ; Gumpenberger, Thomas ; Kurosaki, Ryozo ; Kawaguchi, Yoshizo ; Narazaki, Aiko ; Niino, Hiroyuki
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba
Abstract :
Laser-induced backside wet etching (LIBWE) method can be applied for fabricating novel microfluidic devices. We have fabricated a microfluidic device incorporating two-dimensional array of microbeads with 10 mum diameter for selective DNA capturing.
Keywords :
DNA; arrays; bioMEMS; biochemistry; biological techniques; etching; glass; laser beam machining; microfluidics; molecular biophysics; SiO2; laser-induced backside wet etching method; laser-machined surface microstructures; microfluidic bead array device fabrication; selective DNA capturing; silica glass; size 10 mum; Chemical analysis; DNA; Fluorescence; Glass; Microfluidics; Microstructure; Optical arrays; Optical device fabrication; Silicon compounds; Surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452702
