Title :
Femtosecond Laser Nanomachining Applications in Fused Silica
Author :
Taylor, Rod S. ; Hnatovsky, Cyril ; Simova, Eli ; Pattathil, Rajeev ; Liu, Jiaren ; Rayner, David M. ; Corkum, Paul B.
Author_Institution :
Nat. Res. Council of Canada, Ottawa
Abstract :
Focused femtosecond laser light can produce beautifully arrayed self-organized nanocracks inside fused silica. These nanocracks provide a unique capability for nanomachining micro- and nanofluidic channels, nanoporous capillaries and rewritable data storage elements.
Keywords :
high-speed optical techniques; laser beam machining; nanotechnology; femtosecond laser nanomachining; fused silica; microfluidic channels; nanocracks; nanofluidic channels; nanoporous capillaries; rewritable data storage elements; Chemical lasers; Etching; Laser applications; Laser beams; Optical arrays; Optical materials; Optical pulses; Optical refraction; Silicon compounds; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-55752-834-6
DOI :
10.1109/CLEO.2007.4452782
