DocumentCode :
3009056
Title :
Theoretical design of CMOS SAW resonator
Author :
Soeroso, Iksannurazmi Bambang ; Nordin, Anis Nurashikin
Author_Institution :
Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
fYear :
2012
fDate :
3-5 July 2012
Firstpage :
648
Lastpage :
652
Abstract :
Traditionally, surface acoustic wave (SAW) resonators are key components in transceiver systems. SAW devices can act as high pass or low filters, high quality resonators and are usually fabricated on piezoelectric substrates such as quartz or lithium niobate. Recently, there has been interest to design the SAW devices using complementary metal-oxide semiconductor (CMOS) or integrated circuit fabrication techniques. This allows the SAW device to be integrated with circuits, yielding low cost and small device size. Generally, a separate deposition steps is being used to implement resonator´s interdigital fingers (IDT). This work presents the theoretical model of a SAW resonator designed in CMOS technology. The device will be designed to minimize losses due to the piezoelectric material and to achieve high quality factors. Critical device parameters such as periodic spacing, number of transducers and reflectors are calculated based on the device´s design equations. The admittance and frequency response of the device is also modeled based on the theoretical equations.
Keywords :
CMOS integrated circuits; frequency response; high-pass filters; interdigital transducers; low-pass filters; piezoelectric materials; surface acoustic wave resonators; CMOS SAW resonator; complementary metal-oxide semiconductor; frequency response; high pass filters; high quality factors; integrated circuit fabrication techniques; interdigital fingers; lithium niobate; low filters; piezoelectric material; quartz; reflectors; surface acoustic wave resonators; theoretical design; transceiver systems; transducers; CMOS integrated circuits; Integrated circuit modeling; Mathematical model; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Complementary metal-oxide semiconductor (CMOS); Interdigital Transducer (IDT); Silicon Dioxide (SiO2); equivalent circuit; surface acoustic wave (SAW) resonator;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Computer and Communication Engineering (ICCCE), 2012 International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-0478-8
Type :
conf
DOI :
10.1109/ICCCE.2012.6271268
Filename :
6271268
Link To Document :
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