• DocumentCode
    3010045
  • Title

    Photonic Band Gap Synthesis by Optical Phase Mask Lithography

  • Author

    Chan, Timothy Y.M. ; Toader, Ovidiu ; John, Sajeev

  • Author_Institution
    Univ. of Toronto, Toronto
  • fYear
    2007
  • fDate
    6-11 May 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We provide a simple and efficient approach for fabricating diamond architecture photonic crystals using single-exposure, single-beam, optical interference lithography based on diffraction of light through an optical phase mask.
  • Keywords
    diamond; light diffraction; phase shifting masks; photolithography; photonic band gap; photonic crystals; diamond architecture photonic crystals; light diffraction; optical interference lithography; optical phase mask lithography; photonic band gap synthesis; Holographic optical components; Holography; Lithography; Optical diffraction; Optical materials; Optical refraction; Optical variables control; Photonic band gap; Photonic crystals; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-55752-834-6
  • Type

    conf

  • DOI
    10.1109/CLEO.2007.4452889
  • Filename
    4452889
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3010045