• DocumentCode
    3011815
  • Title

    Hydrogen sensing performance of TiO2 nanotubes at room temperature

  • Author

    Moon, J.Y. ; Tuokko, I. ; Suominen, A. ; Tuominen, A. ; Oh, D.S. ; Park, B.K. ; Kim, H.

  • Author_Institution
    Dept. of Inf. Technol., Univ. of Turku, Turku, Finland
  • fYear
    2010
  • fDate
    4-6 Oct. 2010
  • Firstpage
    73
  • Lastpage
    76
  • Abstract
    We report the hydrogen sensing properties of a sensor using TiO2 nanotube arrays. The TiO2 nanotube arrays were fabricated by anodization on titanium foil, in an electrolyte containing 0.5 wt% hydrofluoric acid mixed with water, the electric potential being 15V. TiO2 nanotube arrays were annealed at 600 Celsius for 1 h. The sensors were equipped with platinum electrodes. These two were connected with a metal wire using silver paste. The measurements of the sensor´s electrical resistance were performed in NTP. The hydrogen sensor using TiO2 nanotube arrays shows a linear sensitivity with various hydrogen concentrations. After repeating exposure to hydrogen at room temperature, the sensor´s resistance indicated a stable recovery to its initial resistance. The reproducibility of this exam is reliable.
  • Keywords
    anodisation; electrical resistivity; electrodes; gas sensors; nanofabrication; nanotube devices; platinum; titanium compounds; TiO2; anodization; electrical resistance; hydrogen sensing performance; hydrogen sensor; linear sensitivity; metal wire; nanotube arrays; platinum electrodes; silver paste; temperature 600 C; time 1 hour; voltage 15 V; Electrodes; Nanotubes; Resistance; Sensitivity; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Conference (BEC), 2010 12th Biennial Baltic
  • Conference_Location
    Tallinn
  • ISSN
    1736-3705
  • Print_ISBN
    978-1-4244-7356-4
  • Electronic_ISBN
    1736-3705
  • Type

    conf

  • DOI
    10.1109/BEC.2010.5631500
  • Filename
    5631500