DocumentCode
3011815
Title
Hydrogen sensing performance of TiO2 nanotubes at room temperature
Author
Moon, J.Y. ; Tuokko, I. ; Suominen, A. ; Tuominen, A. ; Oh, D.S. ; Park, B.K. ; Kim, H.
Author_Institution
Dept. of Inf. Technol., Univ. of Turku, Turku, Finland
fYear
2010
fDate
4-6 Oct. 2010
Firstpage
73
Lastpage
76
Abstract
We report the hydrogen sensing properties of a sensor using TiO2 nanotube arrays. The TiO2 nanotube arrays were fabricated by anodization on titanium foil, in an electrolyte containing 0.5 wt% hydrofluoric acid mixed with water, the electric potential being 15V. TiO2 nanotube arrays were annealed at 600 Celsius for 1 h. The sensors were equipped with platinum electrodes. These two were connected with a metal wire using silver paste. The measurements of the sensor´s electrical resistance were performed in NTP. The hydrogen sensor using TiO2 nanotube arrays shows a linear sensitivity with various hydrogen concentrations. After repeating exposure to hydrogen at room temperature, the sensor´s resistance indicated a stable recovery to its initial resistance. The reproducibility of this exam is reliable.
Keywords
anodisation; electrical resistivity; electrodes; gas sensors; nanofabrication; nanotube devices; platinum; titanium compounds; TiO2; anodization; electrical resistance; hydrogen sensing performance; hydrogen sensor; linear sensitivity; metal wire; nanotube arrays; platinum electrodes; silver paste; temperature 600 C; time 1 hour; voltage 15 V; Electrodes; Nanotubes; Resistance; Sensitivity; Temperature measurement; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Conference (BEC), 2010 12th Biennial Baltic
Conference_Location
Tallinn
ISSN
1736-3705
Print_ISBN
978-1-4244-7356-4
Electronic_ISBN
1736-3705
Type
conf
DOI
10.1109/BEC.2010.5631500
Filename
5631500
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