CMOS monolithic chemiresistor array with microfluidic channel for micro gas chromatograph

A monolithic chemiresistor (CR) array micro-system with microfluidic channel for micro gas chromatograph (μGC) is presented in this paper. A CMOS readout chip was designed for amplifying and conditioning the signal of a 4×2 MPN-coated CR array fabricated on the surface of the CMOS chip. A micro glass lid with input and output capillary tubes was developed as a gas flow channel and mounted on the CMOS array, providing an interface to a micro flow column in a μGC platform. After all of the CMOS-compatible processing, the monolithic CR array was tested within a GC platform, and both the CR array and circuit were demonstrated to function as designed.