Fabricate High performance RF-MEMS inductor with a smart nano magnetic granular film according to function purpose

Design and fabrication of RF (Radio Frequency)-MEMS (Micro-Electro-Mechanical System) planar inductors with a smart material, Permalloy-SiO₂ (PS) nano magnetic granular medium, in accordance with the function purpose of the device is presented. The nano magnetic material aspects determining the contributions and impacts to the device operating at ultra-high frequencies are analyzed via physical model. Properties of the smart PS granular film can be designed and controlled by varied microstructure determined by using varied preparation approaches. Therefore, the performance of several types devices with varied PS granular film holds a promise for fabrication of magnetic planar inductors according to function purpose in Giga-Hertz (GHz) applications.