Local infiltration of individual pores with dyes in 2D macroporous silicon photonic crystals

Photonic crystals (PhC) are promising candidates for novel optical components. Passive devices realized with PhC, e.g. complex waveguides, are widely known. However for many applications active devices are required. One possible way to realize such devices is the functionalization of 2D PhC. This can be done by combining 2D PhC with dyes. We present an experimental technique for the infiltration of individual pores which allows the realization of a broad spectrum of different device designs. For the infiltration of individual pores we use 2D PhC templates made of macroporous silicon, electron beam physical vapor deposition, focused ion beam technique, electrochemical deposition and the wetting assisted templating (WASTE)-process [1]-[3].