Title :
Sputtered Ge-Si heteroepitaxial thin films for photodetection in third window
Author :
Feré, Massimo ; Lanata, Marta ; Piccinin, Davide ; Pietralunga, Silvia M. ; Zappettini, Andrea ; Ossi, Paolo M. ; Martinelli, Mario
Author_Institution :
CoreCom, Milan
Abstract :
DC-pulsed magnetron sputtering (PMS) allows to produce heteroepitaxial p-type Germanium thin films on 6rdquo Silicon wafers. Integrated p-n photodiodes, based on DC-PMS deposited Ge/Si heterojunctions, feature flat responsivity over the whole third communication window.
Keywords :
Ge-Si alloys; p-n heterojunctions; photodetectors; semiconductor epitaxial layers; semiconductor heterojunctions; sputter deposition; DC-pulsed magnetron sputtering; SiGe; p-n photodiodes; photodetection; sputtered heteroepitaxial thin films; Amorphous magnetic materials; Amorphous materials; Germanium; Optical films; Photodiodes; Rough surfaces; Semiconductor thin films; Sputtering; Surface cleaning; Surface roughness;
Conference_Titel :
Group IV Photonics, 2008 5th IEEE International Conference on
Conference_Location :
Cardiff, Wales
Print_ISBN :
978-1-4244-1769-8
Electronic_ISBN :
978-1-4244-1768-1
DOI :
10.1109/GROUP4.2008.4638169
