DocumentCode
3016367
Title
Zero LSAW propagation loss in a SiO2 / periodic grating/LiTaO3 structure
Author
Biryukov, Sergey V. ; Weihnacht, Manfred
Author_Institution
IFW Dresden, Dresden
fYear
2008
fDate
2-5 Nov. 2008
Firstpage
2217
Lastpage
2220
Abstract
A periodic electrode grating on rotated Y-cut lithium tantalate covered by a corrugated silicon dioxide film is investigated by the known impedance method/natural boundary element method. It is shown that the propagation loss of the leaky surface acoustic wave in such structure can be reduced considerably keeping a large reflection coefficient by changing the crystal cut angle. If the silicon dioxide thickness/wavelength ratio is equal to 20% and the electrode thickness/wavelength ratio is changed from 0% to 7%, then zero propagation loss at fundamental frequencies is achievable for cut angles in the range from 340 to 490 and from 430 to 710 for the cases of resonance and antiresonance, respectively.
Keywords
acoustic resonators; acoustic wave propagation; boundary-elements methods; electrodes; impedance matrix; lithium compounds; silicon compounds; surface acoustic waves; thin films; SiO2-LiTaO3; acoustic resonator; boundary element method; crystal cut angle; impedance method; leaky surface acoustic waves; periodic electrode grating; reflection coefficient; rotated Y-cut lithium tantalate crystal; silicon dioxide film; zero LSAW propagation; Boundary element methods; Electrodes; Gratings; Impedance measurement; Lithium compounds; Optical films; Propagation losses; Semiconductor films; Silicon compounds; Surface acoustic waves; Leaky SAW; periodic grating; propagation loss; resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location
Beijing
Print_ISBN
978-1-4244-2428-3
Electronic_ISBN
978-1-4244-2480-1
Type
conf
DOI
10.1109/ULTSYM.2008.0549
Filename
4803197
Link To Document