Micromachined PMN-PT single crystal composite transducers -- 15–75 MHz PC-MUT

Author

Jiang, X. ; Snook, K. ; Cheng, A. ; Hackenberger, W.S. ; Geng, X.

Author_Institution

TRS Technol., Inc., State College, PA

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

164

Lastpage

167

Abstract

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz-75 MHz were fabricated and characterized with coupling coefficient of 0.67-0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.

Keywords

bioMEMS; biomedical transducers; biomedical ultrasonics; lead compounds; micromachining; piezoelectric transducers; ultrasonic transducers; PC-MUT; PMN-PT single crystal piezoelectric composite; PMN-PbTiO₃; coupling coefficient; frequency 15 MHz to 75 MHz; medical imaging application; micromachined ultrasound transducer; resonance frequency; ultrasound imaging; Etching; Fabrication; Frequency; High-resolution imaging; Piezoelectric transducers; Prototypes; Resists; Resonance; Ultrasonic imaging; Ultrasonic transducers; 1–3 composite; PC-MUT; PMN-PT single crystal; micromachining of piezoelectrics; piezoelectric composite; ultrasound transducer;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0040

Filename

4803220