Self-Organization Method for Coupled Thermo-Mechanical Analysis of Micro-Structure

In order to solve the multi-physical field calculating respectively, adding the result simply, and low computational efficiency by finite element method for coupled multi-physics fields analysis in micro-electro-mechanical system, we put forward self organization analysis method in this paper. Using cellular automata as a tool, flat-panel in a typical micro-mechanical as a study object, this study transforms a continuous unit into M-shaped truss structure according to strain energy conservation, gets the self-organization evolution rules of thermal stress and electric stress based on double-force pole stress equations, resolves the thermal mechanical,electric mechanical, thermal electric mechanical coupling problems by building the cellular automata model. Finally, the result proves the feasibility and efficiency of self-organization analysis method from computer simulation, provides an effective analysis method for multi-physics fields coupling.