Title :
Temperature sensor based on silicon microring
Author :
Qiang Shi ; Shengbo Sang ; Wendong Zhang ; Pengwei Li ; Jie Hu ; Gang Li
Author_Institution :
Key Lab. of Adv. Transducers & Intell. Control Syst., MicroNano Syst. Res. Center, Taiyuan Univ. of Technol., Taiyuan, China
Abstract :
A comprehensive investigation of silicon microring sensor, which is used for temperature detection, is reported in this paper, and the theory was introduced in detail. Numerical analysis shows that the silicon microring has a high sensitivity and a very good linearity between real-time temperature and effective index. By optimizing the parameters, the microring sensor can obtain a higher sensitivity. The resonance peak will shift obviously when the temperature changes. A temperature change of 0.1°C can be detected. It also proves that the geometry structure of waveguide will not influence the sensor sensitivity. This sensor will have a great potential usage for real time sensing.
Keywords :
elemental semiconductors; microsensors; numerical analysis; silicon; temperature sensors; Si; geometry; numerical analysis; silicon microring sensor; temperature 0.1 degC; temperature sensor; waveguide structure; Indexes; Optical resonators; Optical waveguides; Silicon; Temperature measurement; Temperature sensors; microring; sensing; thermo-optic effect;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6720930
