Title :
A hands-on laboratory for teaching microfabrication
Author :
Marti, Joan ; Sibakoti, Mandip ; Jalali, Mohammad ; Campbell, Stephen A.
Author_Institution :
Nanofabrication Center, Univ. of Minnesota, Minneapolis, MN, USA
Abstract :
A set of laboratory activities has been developed to simulate multiple steps in the integrated circuit fabrication process. The Microfabrication Teaching Laboratory offers tools and procedures for a comprehensive simulation of the device fabrication process, with the goal of producing working devices such as a p-n diode, a solar cell and a MOSFET on a silicon wafer substrate. The lab includes activities aimed at wafer oxidation, patterning the oxide layer via optical lithography, etching, selective doping to achieve a p-n junction, and device characterization. Portions of the laboratory have been tested in undergraduate teaching labs with successful results.
Keywords :
engineering education; etching; integrated circuit manufacture; integrated circuit technology; laboratories; microfabrication; photolithography; semiconductor doping; semiconductor industry; teaching; device fabrication process; etching process; hands-on laboratory; integrated circuit fabrication process; laboratory activity; microfabrication teaching laboratory; oxide layer via optical lithography; patterning process; selective doping; wafer oxidation; Educational institutions; Fabrication; Laboratories; Lithography; Resists; Silicon;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2013 13th IEEE Conference on
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-0675-8
DOI :
10.1109/NANO.2013.6721011
