Internal phase inversion narrow bandwidth MEMS filter

Author

Yan, Jize ; Seshia, Ashwin A. ; Le Phan, Kim ; Van Beek, Joost T M

Author_Institution

Dept. of Eng., Univ. of Cambridge, Cambridge

fYear

2008

fDate

2-5 Nov. 2008

Firstpage

705

Lastpage

708

Abstract

This paper reports a novel capacitively coupled twin beam resonator internal phase inversion filter fabricated in a SOI MEMS process. A narrow bandwidth of 0.0157% is demonstrated with a low control-voltage of -0.87 V. The bandwidth can be substantially reduced by utilizing an electrical coupling spring as opposed to a mechanical coupling-spring. The bandwidth is tunable with control achieved using a differential DC bias. A summary and comparison with other members of the phase inversion filter family is also included.

Keywords

band-pass filters; microfabrication; micromechanical resonators; resonator filters; silicon-on-insulator; SOI MEMS process; Si-JkJk; capacitively coupled twin beam resonator; electrical coupling spring; internal phase inversion filter fabrication; mechanical coupling spring; narrow bandwidth MEMS filter; voltage -0.87 V; Bandwidth; Capacitance; Digital filters; Micromechanical devices; Optical coupling; Optical filters; Optical resonators; Phased arrays; Resonator filters; Voltage; MEMS; filters; narrow bandwidth; resonators;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2008. IUS 2008. IEEE

Conference_Location

Beijing

Print_ISBN

978-1-4244-2428-3

Electronic_ISBN

978-1-4244-2480-1

Type

conf

DOI

10.1109/ULTSYM.2008.0168

Filename

4803368