Title :
Micro-heater filament on polyimide membrane for gas sensor applications
Author :
Noor, Mimiwaty Mohd ; Sugandi, Gandi ; Majlis, Burhanuddin Yeop
Author_Institution :
Inst. of Microeng. & Nanoelectron. (IMEN), Univ. Kebangsaan Malaysia (UKM), Bangi, Malaysia
Abstract :
Micro-heater filaments on polyimide membrane for micro gas sensors are fabricated and measured. Resistance as well as power consumption are calculated and temperature of the filament is then extracted. The polyimide membrane is supported by silicon frame that has been etched from the back side by bulk micromachining in a potassium hydroxide (KOH) solution. The filament is made of platinum with a thickness of 300 nm. The membrane thickness is 20 μm. It has an area of 3.5 mm × 3.5 mm and the area covered by the heater filament is 750 μm × 750 μm. The filament shows power consumption of 243 mW at temperature of 115 oC.
Keywords :
gas sensors; membranes; micromachining; microsensors; platinum; polymers; potassium compounds; silicon; KOH; bulk micromachining; microgas sensors; microheater filament; polyimide membrane; power 243 mW; silicon frame; size 20 mum; size 3.5 mm; size 300 nm; size 750 mum; Gas detectors; Heating; Polyimides; Resistance; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Semiconductor Electronics (ICSE), 2012 10th IEEE International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4673-2395-6
Electronic_ISBN :
978-1-4673-2394-9
DOI :
10.1109/SMElec.2012.6417160
