Title :
High-frequency piezoelectric PZT film micromachined ultrasonic arrays
Author :
Wu, D.W. ; Zhou, Q.F. ; Shung, K.K. ; Liu, C.G. ; Djuth, F.T.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA
Abstract :
This paper presents the latest development of high-frequency PZT film ultrasonic linear arrays. A PZT thick film of 22 mum in thickness was fabricated with a spin-coating method. The film was found to have a remnant polarization of 30 muC/cm2 and a coercive field Ec of 70 KV/cm. A high-frequency linear array was successfully fabricated with the film. The array shows a center frequency of 80 MHz and a bandwidth (-6 dB) of 80% with a layer of parylene as the matching. Measured results also show that the array has an insertion loss of -41 dB and a cross-talk of -25 dB at the center frequency.
Keywords :
bioMEMS; biomedical transducers; biomedical ultrasonics; lead compounds; micromachining; piezoelectric transducers; spin coating; thick film devices; ultrasonic transducer arrays; PZT; coercive field; frequency 80 MHz; high-frequency piezoelectric PZT film; loss -41 dB; micromachined ultrasonic linear array; parylene layer; remnant polarization; size 22 mum; spin-coating method; thick film fabrication; Fabrication; Frequency; Heat treatment; Piezoelectric films; Piezoelectric transducers; Polarization; Powders; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; High-frequency; Linear array; Micromachined; PZT film;
Conference_Titel :
Ultrasonics Symposium, 2008. IUS 2008. IEEE
Conference_Location :
Beijing
Print_ISBN :
978-1-4244-2428-3
Electronic_ISBN :
978-1-4244-2480-1
DOI :
10.1109/ULTSYM.2008.0295
