DocumentCode
3027273
Title
The Impact of Ultrashort Femtosecond Pulse-Shaping Technology for Micromachining
Author
Dantus, Marcos
Author_Institution
Michigan State Univ., East Lansing
fYear
2007
fDate
6-11 May 2007
Firstpage
1
Lastpage
1
Abstract
Ultrashort laser pulses improve micromachining but they suffer significant phase distortions when focused by microscope objectives. Breakthrough technology to correct high order phase distortions is used to improve the machining characteristics of metals and semiconductors.
Keywords
laser materials processing; micromachining; micromachining; phase distortions; ultrashort femtosecond pulse-shaping technology; Chemical lasers; Laser noise; Laser theory; Micromachining; Optical harmonic generation; Optical pulse shaping; Optical pulses; Semiconductor lasers; Surface emitting lasers; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2007. CLEO 2007. Conference on
Conference_Location
Baltimore, MD
Print_ISBN
978-1-55752-834-6
Type
conf
DOI
10.1109/CLEO.2007.4453749
Filename
4453749
Link To Document