Magnetically actuated CMOS micromachined cantilever-in-cantilever devices

Author

Shen, B. ; Robinson, A.M. ; Allegretto, W. ; Ma, Yuan ; Yu, Bing ; Hu, Ming

Author_Institution

Dept. of Electr. Eng., Alberta Univ., Edmonton, Alta., Canada

Volume

1

fYear

1996

fDate

26-29 May 1996

Firstpage

84

Abstract

A CMOS-compatible magnetically actuated micromachined cantilever device is described. The structure employs the concept of nested cantilevers to enhance the angular deflection produced by Lorentz forces acting at the ends of each cantilever. Devices fabricated by two CMOS processes were tested. Static and dynamic bi-directional deflection responses were measured; static deflections of more than 2.5° and dynamic resonance deflections of 65° were obtained, Resonant frequencies were observed from 4.5 kHz to 56 kHz. Numerical simulations were performed and agree well with experiment

Keywords

CMOS integrated circuits; microactuators; micromachining; micromechanical devices; 4.5 to 56 kHz; CMOS micromachined cantilever-in-cantilever device; Lorentz force; angular deflection; bi-directional response; dynamic deflection; magnetic actuation; numerical simulation; resonant frequency; static deflection; Arm; Bidirectional control; CMOS process; Magnetic analysis; Magnetic devices; Micromachining; Numerical simulation; Performance analysis; Resonant frequency; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 1996. Canadian Conference on

Conference_Location

Calgary, Alta.

ISSN

0840-7789

Print_ISBN

0-7803-3143-5

Type

conf

DOI

10.1109/CCECE.1996.548044

Filename

548044