• DocumentCode
    3040458
  • Title

    High efficiency radial-junction Si nanohole solar cells formed by self-assembling high aspect ratio plasma etching

  • Author

    Li, Hua-Min ; Lee, Dae-Yeong ; Lim, Yeong-Dae ; Yang, Cheng ; Zhang, Gang ; Kim, Hyunjin ; Cha, SeungNam ; Kim, Jong Min ; Yoo, Won Jong

  • Author_Institution
    Dept. of Nano Sci. & Technol., Sungkyunkwan Univ., Suwon, South Korea
  • fYear
    2011
  • fDate
    5-7 Dec. 2011
  • Abstract
    A drastic improvement in conversion efficiency was achieved from Si solar cells with radial-junction nanohole structure of a high aspect ratio of ~10 which is fabricated by self-assembling plasma etching. A conversion efficiency of 27.8 % was predicted based on an optimization of various structural parameters by numerical simulations, and a design principle for realizing high efficiency Si nanohole surface texture for photovoltaic devices was demonstrated.
  • Keywords
    elemental semiconductors; nanofabrication; numerical analysis; optimisation; self-assembly; silicon; solar cells; sputter etching; surface texture; Si; conversion efficiency; high efficiency radial-junction nanohole solar cell; nanohole surface texture; numerical simulation; photovoltaic device; radial-junction nanohole structure; self-assembling high aspect ratio plasma etching; structural parameter optimization; Etching; Junctions; Neodymium; Periodic structures; Photovoltaic cells; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2011 IEEE International
  • Conference_Location
    Washington, DC
  • ISSN
    0163-1918
  • Print_ISBN
    978-1-4577-0506-9
  • Electronic_ISBN
    0163-1918
  • Type

    conf

  • DOI
    10.1109/IEDM.2011.6131684
  • Filename
    6131684