DocumentCode
3040765
Title
Proceedings of the Thirteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.99CH36301)
fYear
1999
fDate
23-23 June 1999
Abstract
The following topics were dealt with: microelectronics development university programs; semiconductor devices; university-industrial partnerships; device processing issues; university curriculum development; modelling and simulation; MEMS
Keywords
electric sensing devices; field effect transistors; integrated circuit manufacture; integrated circuit modelling; micromechanical devices; semiconductor process modelling; MEMS; device processing; microelectronics; modelling; semiconductor devices; simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location
Minneapolis, MN, USA
ISSN
0749-6877
Print_ISBN
0-7803-5240-8
Type
conf
DOI
10.1109/UGIM.1999.782809
Filename
782809
Link To Document