DocumentCode
3041302
Title
Surface related degradation of sensitivity in lateral transistor magnetic sensors
Author
Guvench, M.G. ; Chu, H.S.
Author_Institution
Univ. of Southern Maine, Gorham, ME, USA
fYear
1999
fDate
1999
Firstpage
142
Lastpage
145
Abstract
It is shown that the sensitivity of silicon lateral P-N-P magneto-transistors can have a significant dependency on the operating conditions of their surface. The sensitivity of experimental devices built were observed to change by as much as an order of magnitude, depending on the design, as the surface conditions were swept from accumulation to inversion. The surface conditions between the emitter and the collector of such devices need to be stabilized with a constant biased gate for reproducible magnetic field measurements in addition to employing a fabrication process that yields consistent surface conditions and minimum surface state and charge density
Keywords
bipolar transistors; magnetic field measurement; magnetic sensors; sensitivity; surface treatment; Si; charge density; constant biased gate; lateral P-N-P magneto-transistors; lateral transistor magnetic sensors; magnetic field sensor; sensitivity; surface conditions; CMOS technology; Degradation; Fabrication; Hall effect devices; MOSFETs; Magnetic field measurement; Magnetic fields; Magnetic semiconductors; Magnetic sensors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location
Minneapolis, MN
Print_ISBN
0-7803-5240-8
Type
conf
DOI
10.1109/UGIM.1999.782840
Filename
782840
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