Title :
Young´s modulus measurement of thin film PZT
Author :
Zhou, Jia ; McMcollough, Trevor ; Mantell, Susan C. ; Zurn, Shayne
Author_Institution :
Dept. of Mech. Eng., Minnesota Univ., Minneapolis, MN, USA
Abstract :
In this paper, experimental measurements of the modulus for thin film PZT are presented. Several wafers with PZT patterned over Pt/Ti/SiO 2 were fabricated. In each wafer, circular membranes of diameters ranging from 668 μm to 1667 μm were constructed using reactive ion etching. Film moduli for the various material layers were found by measuring membrane deflection under a concentrated load. Layer thickness was verified using SEM. To account for the initial curvature in the membrane, the relationship between load, deflection and stiffness was approximated by a spherical shell model. These stiffness values provided the basis for predicting micro cantilever beam vibration behavior
Keywords :
Young´s modulus; elastic moduli measurement; ferroelectric thin films; lead compounds; scanning electron microscopy; PZT; PbZrO3TiO3; Pt-Ti-SiO2; SEM; Young´s modulus; circular membranes; layer thickness; membrane deflection; micro cantilever beam vibration; reactive ion etching; spherical shell model; thin film; Biomembranes; Equations; Etching; Mechanical engineering; Micromechanical devices; Piezoelectric films; Semiconductor device modeling; Silicon; Transistors; Vibrations;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-5240-8
DOI :
10.1109/UGIM.1999.782843
