Title :
The manufacture of CMOS integrated circuits in a university microelectronics laboratory
Author_Institution :
Dept. of Microelectron. Eng., Rochester Inst. of Technol., NY, USA
Abstract :
The manufacture of CMOS integrated circuits in a university laboratory course is difficult because the process is complicated and time consuming. At RIT we have developed an approach that allows the manufacture of CMOS integrated circuits similar to manufacturing in a semiconductor factory. This allows the student to learn about semiconductor manufacturing in addition to fabrication technology for CMOS integrated circuits
Keywords :
CMOS integrated circuits; integrated circuit manufacture; lithography; CMOS integrated circuits; laboratory techniques; lithography; semiconductor manufacturing; CMOS integrated circuits; CMOS technology; Integrated circuit manufacture; Integrated circuit technology; Laboratories; Manufacturing processes; Microelectronics; Production facilities; Semiconductor device manufacture; Testing;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 1999. Proceedings of the Thirteenth Biennial
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-5240-8
DOI :
10.1109/UGIM.1999.782855
