Title :
Finite Element Modelling of Flexural Plate Devices
Author :
Matthews, G.I. ; Ippolito, S.J. ; Kalantar-zadeh, K. ; Wlodarski, W. ; Holland, A.
Author_Institution :
Sch. of Electr. & Comput. Eng., R. Melbourne Inst. of Technol., Vic.
Abstract :
A two dimensional finite element model has been developed for the simulation of a layered flexural plate wave device using the ANSYS package. The simulated device consists of a 2.0 μm silicon nitride thin film, followed by a 0.4 μm aluminum ground layer. A 0.6 μm zinc oxide piezoelectric layer was defined to excite acoustic waves. Good agreement of device frequency response and displacement profiles have been achieved in comparison with other numerical simulation methods. In this paper, the finite element (FE) method is proposed as a benchmark for an alternative analysis based upon a Green´s function method. Furthermore, the FE method can be used to obtain other device parameters, such as insertion loss and charge density, which are presented
Keywords :
Green´s function methods; acoustic transducers; finite element analysis; optical films; optical losses; optical sensors; piezoelectric materials; silicon compounds; zinc compounds; 0.6 mum; 2.0 mum; ANSYS; Al; Green function method; SiN; aluminum ground layer; charge density; finite element modelling; flexural plate devices; insertion loss; silicon nitride thin film; Acoustic waves; Aluminum; Finite element methods; Frequency response; Packaging; Piezoelectric films; Semiconductor thin films; Silicon; Thin film devices; Zinc oxide; ANSYS; Finite Element; Flexural Plate Waves; Lamb;
Conference_Titel :
Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on
Conference_Location :
Brisbane, Qld.
Print_ISBN :
0-7803-8820-8
DOI :
10.1109/COMMAD.2004.1577513
