• DocumentCode
    3045130
  • Title

    PDF Not Yet Available In IEEE Xplore

  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    630
  • Lastpage
    630
  • Abstract
    The document that should appear here is not currently available.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805461
  • Filename
    4805461
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3045130