• DocumentCode
    3045282
  • Title

    Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation

  • Author

    Shetye, S.B. ; Eskinazi, I. ; Arnold, D.P.

  • Author_Institution
    Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL
  • fYear
    2009
  • fDate
    25-29 Jan. 2009
  • Firstpage
    669
  • Lastpage
    672
  • Abstract
    This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1 mm times 1 mm times 0.5 mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 - 240 s.
  • Keywords
    finite element analysis; micromagnetics; self-assembly; angular orientation; magnetic self-assembly; millimeter scale components; part-to-part assembly; permanent micromagnets; Etching; Magnetic forces; Magnets; Polyimides; Powders; Robotic assembly; Self-assembly; Shape control; Silicon; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
  • Conference_Location
    Sorrento
  • ISSN
    1084-6999
  • Print_ISBN
    978-1-4244-2977-6
  • Electronic_ISBN
    1084-6999
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2009.4805471
  • Filename
    4805471