DocumentCode
3045282
Title
Part-to-Part and Part-to-Substrate Magnetic Self-Assembly of Millimeter Scale Components with Angular Orientation
Author
Shetye, S.B. ; Eskinazi, I. ; Arnold, D.P.
Author_Institution
Interdiscipl. Microsyst. Group, Univ. of Florida, Gainesville, FL
fYear
2009
fDate
25-29 Jan. 2009
Firstpage
669
Lastpage
672
Abstract
This paper presents multifunctional self-assembly of millimeter scale components using magnetic forces between permanent micromagnets integrated on the component surfaces. Part-to-part assembly is demonstrated by batch assembly of free-floating 1 mm times 1 mm times 0.5 mm silicon parts in a liquid environment with the assembly yield varying from 88% to 90%. Part-to-substrate assembly is demonstrated by assembling an ordered array on a substrate in a dry environment with the assembly yield varying from 87% to 98%. In both cases, diverse magnetic shapes/patterns are used to control the alignment and angular orientation of the components and assembly times range from 15 - 240 s.
Keywords
finite element analysis; micromagnetics; self-assembly; angular orientation; magnetic self-assembly; millimeter scale components; part-to-part assembly; permanent micromagnets; Etching; Magnetic forces; Magnets; Polyimides; Powders; Robotic assembly; Self-assembly; Shape control; Silicon; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location
Sorrento
ISSN
1084-6999
Print_ISBN
978-1-4244-2977-6
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2009.4805471
Filename
4805471
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