Title :
High Speed (GHz), Ultra-High Pressure (GPA) Sensor Array Fabricated in Integrated CMOS+MEMS Process
Author :
Okandan, Murat ; Olsson, Roy ; Baker, Michael ; Resnick, Paul ; Hill, Thomas A. ; Lackey, Chad ; Pearson, Sean ; Castaneda, Jaime ; Trott, Wayne ; Jones, David
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
In order to observe and quantify pressure levels generated during testing of energetic materials, a sensor array with high temporal resolution (~1 ns) and extremely high pressure range (> 1 GPa) is needed. We have developed such a sensor array which utilizes a novel integrated high performance CMOS+MEMS process.
Keywords :
CMOS integrated circuits; detector circuits; microsensors; pressure sensors; sensor arrays; energetic materials; high speed ultrahigh pressure sensor array; integrated CMOS-MEMS process; Aluminum nitride; CMOS process; Capacitive sensors; Circuits; Electrodes; Etching; Fabrication; Mechanical sensors; Sensor arrays; Tungsten;
Conference_Titel :
Micro Electro Mechanical Systems, 2009. MEMS 2009. IEEE 22nd International Conference on
Conference_Location :
Sorrento
Print_ISBN :
978-1-4244-2977-6
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2009.4805515
