Localized deposition of metallic molybdenum particles in ambient air using atmospheric-pressure microplasma

Author

Shimizu, Yoshiki ; Koga, Kenji ; Sasaki, Takeshi ; Mariotti, Davide ; Terashima, Kazuo ; Koshizaki, Naoto

Author_Institution

Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Ibaraki

fYear

2007

fDate

5-8 Nov. 2007

Firstpage

174

Lastpage

175

Abstract

The authors report the details of the deposition process and the unique structure of metallic Mo particles obtained under specific conditions. Results indicated that the surface of the as-deposited particles was oxidized, but the inside of the deposit is mostly metallic Mo. The microstructure of the star-shaped Mo particles was characterized with TEM and TED. The analysis of the complicated TED pattern indicated that the star-shaped Mo particles are five-fold symmetrical multiply twinned particle.

Keywords

molybdenum; plasma materials processing; transmission electron microscopy; twin boundaries; Mo; TED pattern; TEM; atmospheric-pressure microplasma; five-fold symmetrical multiply twinned particle; localized deposition; metallic molybdenum particles; microstructure; star-shaped Mo particles; Circuits; Materials science and technology; Metals industry; Nanotechnology; Optical microscopy; Oxygen; Raw materials; Scanning electron microscopy; Transmission electron microscopy; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology, 2007 Digest of papers

Conference_Location

Kyoto

Print_ISBN

978-4-9902472-4-9

Type

conf

DOI

10.1109/IMNC.2007.4456160

Filename

4456160