Title :
Control of Young´s Modulus for Carbon Nanopillars Grown by Focused Ion Beam Induced Chemical Vapor Deposition
Author :
Nonaka, K. ; Tamaru, K. ; Nagase, M. ; Yamaguchi, H. ; Warisawa, S. ; Ishihara, S.
Author_Institution :
NTT Corp., Kanagawa
Abstract :
The aim of the paper is to discuss about the carbon nanopillars with different heights fabricated by FIB-CVD, achieved the uniformization of pillar diameter and the homogenization of Young´s modulus for growth heights by controlling focus position of FIB.
Keywords :
Young´s modulus; carbon nanotubes; chemical vapour deposition; focused ion beam technology; nanotechnology; C; FIB-CVD; Young´s modulus; carbon nanopillars; focused ion beam induced chemical vapor deposition; homogenization; Chemical vapor deposition; Fabrication; Focusing; Ion beams; Nanoelectromechanical systems; Numerical analysis; Resonance; Resonant frequency; Scanning electron microscopy; Shape control;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456201
