Two Temperatures Components in CCP Argon 13.56-MHz RF Discharge

Careful radio frequency (RF) compensation and empirical modeling of Langmuir probe I-V characteristics of argon capacitive coupled asymmetric plasma discharge indicated the existence of two temperature groups of electrons. The new eight free fitting parameters empirical equation suggested has the capability of better detection of any existence of such two temperature electron groups. Analysis shows that the first group of electrons has a low mean temperature that is almost independent of RF power. The second group of electrons is a high-temperature component that seems to increase with increasing RF power. The population contribution of the lower temperature group seems to increase with increasing RF power.