Title :
Ultraviolet Nanoimprint Lithography Applicable to Thin-Film Transistor Liquid-Crystal Display
Author :
Lee, Eung-Sug ; Jeong, Jun-Ho ; Kim, Ki-Don ; Choi, Dae-Geun ; Choi, Jun-Hyuk ; Lee, Dong-II ; Altun, Ali Ozhan ; Lee, Soon-Won
Author_Institution :
Korea Inst. of Machinery & Mater., Daejeon
Abstract :
In this study, an ultraviolet nanoimprint lithography (UV-NIL) process using a quartz stamp in a low vacuum environment is presented. Experimental results demonstrate the potential of the proposed approach as a low-cost lithographic process applicable to flat panel displays.
Keywords :
liquid crystal displays; nanolithography; soft lithography; thin film transistors; ultraviolet lithography; flat panel displays; quartz stamp; thin-film transistor liquid-crystal display; ultraviolet nanoimprint lithography process; vacuum environment; Dry etching; Glass; Liquid crystal displays; Nanolithography; Optical films; Optical microscopy; Rubber; Steel; Substrates; Thin film transistors;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456284
