Circular Emission and Destruction Patterns on a Silicon-Based Microdischarge Array

Author

Golda, Judith ; Kulsreshath, Mukesh ; Boettner, Henrik ; Felix, Valentin ; Dussart, Remi ; Schulz-von der Gathen, Volker

Author_Institution

Dept. of Exp. Phys. II, Ruhr-Univ. Bochum, Bochum, Germany

Volume

42

Issue

10

fYear

2014

fDate

Oct. 2014

Firstpage

2646

Lastpage

2647

Abstract

Silicon-based microdischarge arrays are of high interest as they enable nonthermal plasmas at atmospheric pressure. However, due to their small dimensions, they are highly sensitive to instabilities that can lead to the destruction of the confining structures. The damage, in particular of the top dielectric surface of these devices, can be directly correlated with a destructive operation mode. Images present the emission and destruction structures, which both show a circular pattern along the edges of the cavities.

Keywords

pattern formation; plasma boundary layers; plasma devices; plasma diagnostics; plasma instability; silicon; surface discharges; atmospheric pressure; cavity edges; circular emission pattern; confining structures; destruction pattern; destruction structures; destructive operation mode; emission structures; nonthermal plasmas; plasma instabilities; pressure 1 atm; silicon-based microdischarge array; top dielectric surface; Arrays; Cavity resonators; Dielectrics; Discharges (electric); Image edge detection; Nickel; Plasmas; Atmospheric-pressure plasmas; emission; microplasma array; plasma devices; plasma diagnostic; plasma stability; surface discharges;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2014.2337657

Filename

6879301