Title :
Precision surface profile measurements by comb-based multi-wavelength interferometry
Author :
Minah Choi ; Sangwon Hyun ; Byung Jae Chun ; Seungman Kim ; Seung-Woo Kim ; Young-Jin Kim
Author_Institution :
Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
fDate :
June 30 2013-July 4 2013
Abstract :
Precision measurement of large-stepped surface profiles is demonstrated using the frequency comb of a femtosecond pulse laser. Four optical wavelengths are selected out of the frequency comb to realize the principle of multi-wavelength interferometry with traceability to the Rb atomic clock of time/frequency standard. A large step-height of ~70 μm is exemplarily measured with nanometre precision with the maximum measurable height being extended to tens of mm.
Keywords :
atomic clocks; high-speed optical techniques; light interferometry; rubidium; Rb; atomic clock-of-time-frequency standard; comb-based multiwavelength interferometry; femtosecond pulse laser; nanometre precision; surface profile measurements; Measurement by laser beam; Optical interferometry; Optical surface waves; Semiconductor device measurement; Surface waves; Ultrafast optics; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600040
