Title :
Micromechanical electrostatic K-band switches
Author :
Pacheco, S. ; Nguyen, C.T. ; Katehi, L.P.B.
Author_Institution :
Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA
Abstract :
Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both designs also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages of 14 and 16 V, with RF isolation of better than -30 dB up to 40 GHz.
Keywords :
electrostatic devices; micromechanical devices; microwave devices; switches; 14 V; 16 V; 40 GHz; DC measurement; RF isolation; actuation voltage; cantilever spring; capacitive switch; electrode; micromechanical electrostatic K-band switch; pull-in voltage; serpentine spring; stability; Electrodes; Electrostatics; Fabrication; K-band; Low voltage; Micromechanical devices; Radio frequency; Springs; Structural beams; Switches;
Conference_Titel :
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4471-5
DOI :
10.1109/MWSYM.1998.700675
