Title :
Fabrication and application of structured nanofiber on chip
Author :
Yamamoto, Koji ; Yokoyama, Shiyoshi ; Otomo, Akira
Author_Institution :
Inst. for Mater. Chem. & Eng. (IMCE), Kyushu Univ., Kasuga, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.
Keywords :
etching; focused ion beam technology; integrated optoelectronics; milling; nanofibres; nanophotonics; optical fibre fabrication; FIB milling; Si; Si substrate; chip; fabrication method; integrated optical applications; nanofiber diameter; selective wet etching; structured nanofiber; Fabrication; Milling; Optical fiber sensors; Optical fibers; Silicon;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600413
