High efficiency filtered vacuum-arc plasma source

Cathodic vacuum arc plasma source with B magnetic filter, which turns the plasma stream 90°, is described. T-shaped plasma duct with a system of intercepting screens and fins provides a significally higher degree of absorption of macroparticles when compared to conventional "toroidal" filters (more than an order of magnitude). A small ratio of curvature radius of the plasma duct to its inner radius, a large diameter of the plasma guiding channel (200 mm), and an optimal geometry of transporting magnetic fields ensure a high throughput of the filter - up to 55%.