• DocumentCode
    3074875
  • Title

    Silicon-silica monolithic photonic integration platform for telecommunications applications

  • Author

    Yamada, K. ; Tsuchizawa, T. ; Nishi, H. ; Kou, R. ; Shinojima, H. ; Fukuda, H. ; Hiraki, T. ; Ishikawa, Y. ; Wada, K.

  • Author_Institution
    NTT Microsyst. Integration Labs., NTT Corp., Atsugi, Japan
  • fYear
    2012
  • fDate
    2-6 July 2012
  • Firstpage
    87
  • Lastpage
    88
  • Abstract
    For telecommunications applications of highly-integrated silicon-based photonic devices, we have developed a silicon-silica monolithic photonic platform, in which high performance silica-based passive devices and compact, high-speed silicon-based dynamic/active devices can be monolithically integrated.
  • Keywords
    elemental semiconductors; integrated optics; optical communication; silicon; silicon compounds; Si-SiO2; compact high-speed silicon-based dynamic-active devices; high performance silica-based passive devices; highly-integrated silicon-based photonic devices; silicon-silica monolithic photonic integration platform; telecommunication applications; Monolithic integrated circuits; Optical waveguides; Photonics; Silicon; Silicon compounds; Telecommunications; Wires;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Opto-Electronics and Communications Conference (OECC), 2012 17th
  • Conference_Location
    Busan
  • ISSN
    2166-8884
  • Print_ISBN
    978-1-4673-0976-9
  • Electronic_ISBN
    2166-8884
  • Type

    conf

  • DOI
    10.1109/OECC.2012.6276384
  • Filename
    6276384
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3074875