DocumentCode :
3074922
Title :
Fabrication and characterization of a waveguide with a horizontal air slot for optical trapping
Author :
Kim, In Yong ; Koh, Joonyoung ; Shin, Jung H.
Author_Institution :
Dept. of Phys., KAIST, Daejeon, South Korea
fYear :
2012
fDate :
2-6 July 2012
Firstpage :
95
Lastpage :
96
Abstract :
We have investigated a silicon nitride waveguide with a horizontal air slot which is integrated with SU8 fluidic channel. Formation of air slot is performed in SU8 channel by selective wet etching between SiNx and SiO2.
Keywords :
electron beam lithography; etching; microfluidics; optical waveguides; radiation pressure; silicon compounds; SU8 fluidic channel; SiNx; SiO2; horizontal air slot; optical trapping; selective wet etching; silicon nitride waveguide; Biomedical optical imaging; Charge carrier processes; Optical device fabrication; Optical refraction; Optical resonators; Optical variables control; Optical waveguides;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
ISSN :
2166-8884
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
Type :
conf
DOI :
10.1109/OECC.2012.6276388
Filename :
6276388
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3074922
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