DocumentCode
3074959
Title
MEMS developments in Tsinghua University
Author
Litian, Liu ; Zhijian, Li
Author_Institution
Tsinghua Univ., Beijing, China
fYear
1998
fDate
1998
Firstpage
875
Lastpage
879
Abstract
This article introduces MEMS development in the Institute of Microelectronic at Tsinghua University. Several MEMS devices: smart sensors, micromotors, micropump and microphone are described
Keywords
LIGA; accelerometers; capacitive sensors; diaphragms; etching; intelligent sensors; microactuators; micromachining; micromechanical devices; micromotors; microphones; micropumps; microsensors; piezoresistive devices; pressure sensors; reviews; LIGA; MEMS development; array CMOS magnetic field sensor; array tactile sensor; capacitive accelerometer; condenser microphone; diaphragms; integrated sensors; micro flowmeter; micromachining; micromotors; micropump; microsystems; piezoresistive devices; pressure sensor; smart sensors; system chip; wobble motor; CMOS technology; Integrated circuit technology; Intelligent sensors; Magnetic sensors; Micromechanical devices; Microphones; Sensor arrays; Sensor phenomena and characterization; Silicon; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 1998. Proceedings. 1998 5th International Conference on
Conference_Location
Beijing
Print_ISBN
0-7803-4306-9
Type
conf
DOI
10.1109/ICSICT.1998.786495
Filename
786495
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