Title :
Current profiling for μm-class planar circuit patterns by fiber-edge magneto-optic probe
Author :
Sato, T. ; Iwanami, M. ; Hoshino, S. ; Kishi, M. ; Tsuchiya, M.
Author_Institution :
Association of Super-Advanced Electron. Technol., Tsukuba, Japan
Abstract :
Inversion method of Biot-Savart´s law has been successfully applied to one-dimensional current profiling for μm-class planar circuits. Indispensable is to use a fiber-edge magneto-optic probe of high spatial resolution and high DUT-accessibility.
Keywords :
electric current measurement; fibre optic sensors; magneto-optical sensors; μm-class planar circuit patterns; DUT; current profiling; fiber-edge magneto-optic probe; inversion method of Biot-Savart law; Bandwidth; Frequency; Magnetic circuits; Magnetic field measurement; Magnetic heads; Optical fiber polarization; Optical imaging; Probes; SQUIDs; Temperature sensors;
Conference_Titel :
Microwave Photonics, 2003. MWP 2003 Proceedings. International Topical Meeting on
Print_ISBN :
0-7803-8691-4
DOI :
10.1109/MWP.2003.1422914
