DocumentCode
3076915
Title
Author index
fYear
1996
fDate
14-14 May 1996
Firstpage
237
Lastpage
237
Abstract
The author index contains an entry for each author and coauthor included in the proceedings record.
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Process-Induced Damage, 1996 1st International Symposium on
Conference_Location
Santa Clara, CA
Print_ISBN
0-9651577-0-9
Type
conf
DOI
10.1109/PPID.1996.715247
Filename
715247
Link To Document