DocumentCode :
3077495
Title :
Electrical characteristics of the PZT capacitors using Ir electrodes
Author :
Kondo, K. ; Takai, K. ; Matsuura, K. ; Tamura, T. ; Ashida, H. ; Otani, S.
Author_Institution :
ULSI Dev. Div., Fujitsu Ltd., Kawasaki, Japan
fYear :
1998
fDate :
1998
Firstpage :
125
Lastpage :
128
Abstract :
Pt/IrO2 electrodes for sol-gel PbZrxTi1-xO3 (PZT) capacitors were studied. The morphology, stress, and adhesion of the IrO2 layer depended upon the sputter conditions. The electrical characteristics of the capacitor changed with the morphology of IrO2
Keywords :
adhesion; ceramic capacitors; ferroelectric capacitors; iridium compounds; lead compounds; platinum; sputtered coatings; zirconium compounds; Ir electrodes; PZT capacitors; PbZrxTi1-xO3 capacitors; Pt-IrO2-PbZrO3TiO3; Pt-IrO2-PZT; adhesion; electrical characteristics; morphology; sputter conditions; stress; Capacitors; Electric variables; Electrodes; Ferroelectric films; Ferroelectric materials; Morphology; Nonvolatile memory; Random access memory; Scanning electron microscopy; Sputtering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the Eleventh IEEE International Symposium on
Conference_Location :
Montreux
ISSN :
1099-4734
Print_ISBN :
0-7803-4959-8
Type :
conf
DOI :
10.1109/ISAF.1998.786652
Filename :
786652
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3077495
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