Title :
Dual-focus dual-layered microlens array
Author :
Lee, Jong-Moo ; Lee, Dong Hyo ; Baek, Yongsoon
Author_Institution :
Electron. & Telecommun. Res. Inst., Daejeon, South Korea
Abstract :
Dual-focus microlenses combining dual layers of spherical lens are proposed and fabricated through dual photo lithography processes and a dry etching process. Two types of dual-layered microlenses are fabricated, one with a combination of a small lens on a large lens and another combination of a small low-index lens within a large high-index lens.
Keywords :
microlenses; photolithography; dry etching process; dual layers; dual photo lithography processes; dual-focus dual-layered microlens array; low-index lens; spherical lens; Arrays; Lenses; Microoptics; Microscopy; Optical device fabrication; Optical imaging; Refractive index;
Conference_Titel :
Opto-Electronics and Communications Conference (OECC), 2012 17th
Conference_Location :
Busan
Print_ISBN :
978-1-4673-0976-9
Electronic_ISBN :
2166-8884
DOI :
10.1109/OECC.2012.6276681
